Browsing by Author Macgearailt, Niall
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Rank |
|---|---|---|---|
| 28-Apr-2013 | Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher | Milosavljević, Vladimir ; Macgearailt, Niall; Cullen, P. J.; Daniels, Stephen; Turner, Miles M. |