Browsing by Author Ellingboe, A. R.
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) | Rank |
|---|---|---|---|
| 1-May-2007 | Characterization of the pulse plasma source | Milosavljević, Vladimir ; Karkari, S. K.; Ellingboe, A. R. | |
| 1-Jan-2011 | Influence of plasma chemistry on oxygen triplets | Milosavljević, Vladimir ; Ellingboe, A. R.; Daniels, S. | |
| 1-Jan-2006 | Measured Stark widths and shifts of the neutral argon spectral lines in 4s-4p and 4s-4p′ transitions | Milosavljević, Vladimir ; Ellingboe, A. R.; Djeniže, S. | |
| 9-May-2008 | Real-time plasma control in a dual-frequency, confined plasma etcher | Milosavljević, Vladimir ; Ellingboe, A. R.; Gaman, C.; Ringwood, J. V. |