Browsing by Author Gaman, C.
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) | Rank |
|---|---|---|---|
| 9-May-2008 | Real-time plasma control in a dual-frequency, confined plasma etcher | Milosavljević, Vladimir ; Ellingboe, A. R.; Gaman, C.; Ringwood, J. V. |