Browsing by Author Ringwood, J. V.
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) | Rank |
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9-May-2008 | Real-time plasma control in a dual-frequency, confined plasma etcher | Milosavljević, Vladimir ; Ellingboe, A. R.; Gaman, C.; Ringwood, J. V. |