Please use this identifier to cite or link to this item: https://physrep.ff.bg.ac.rs/handle/123456789/306
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dc.contributor.authorDojčinović, Ivanen
dc.contributor.authorKuraica, Miloraden
dc.contributor.authorPurić, Jagošen
dc.date.accessioned2022-07-12T15:09:03Z-
dc.date.available2022-07-12T15:09:03Z-
dc.date.issued2006-09-07en
dc.identifier.issn0042-207Xen
dc.identifier.urihttps://physrep.ff.bg.ac.rs/handle/123456789/306-
dc.description.abstractPeriodic submicron cylindrical structures (SCS) produced in a single pulse treatment of silicon single crystal by supersonic compression plasma flow have been studied. The nitrogen quasistationary plasma flow generated by magnetoplasma compressor is used for modification of Si (1 0 0) surface. SCS have been analyzed using optical microscopy, scanning electron microscopy and atomic force microscopy. Typical species of cylindrical structures formed at the silicon surface have been discussed. These structures are induced by the plasma flow action and then quenched from the molten state during fast cooling and resolidification. SCS have been compared to periodical silicon surface structures made by plasma, ion beams and laser interaction with silicon. © 2006 Elsevier Ltd. All rights reserved.en
dc.relation.ispartofVacuumen
dc.subjectCapillary wavesen
dc.subjectLIPSSen
dc.subjectPlasma flowen
dc.subjectRippleen
dc.subjectSiliconen
dc.subjectSurface modificationen
dc.titleDiagnostics of silicon submicron cylindrical structures obtained by plasma flow actionen
dc.typeArticleen
dc.identifier.doi10.1016/j.vacuum.2006.01.020en
dc.identifier.scopus2-s2.0-33747801032en
dc.identifier.urlhttps://api.elsevier.com/content/abstract/scopus_id/33747801032en
dc.relation.issue11-12en
dc.relation.volume80en
dc.relation.firstpage1381en
dc.relation.lastpage1385en
item.openairetypeArticle-
item.cerifentitytypePublications-
item.fulltextNo Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextnone-
crisitem.author.orcid0000-0001-8201-8500-
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