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Please use this identifier to cite or link to this item: https://physrep.ff.bg.ac.rs/handle/123456789/316
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dc.contributor.authorDojčinović, I. P.en
dc.contributor.authorKuraica, Miloraden
dc.contributor.authorMitrovi Ć, M.en
dc.contributor.authorRandjelovi, Ć D.en
dc.contributor.authorMatić, M.en
dc.contributor.authorPuri Ć, J.en
dc.date.accessioned2022-07-12T15:09:06Z-
dc.date.available2022-07-12T15:09:06Z-
dc.date.issued2006-01-01en
dc.identifier.isbn1424401178en
dc.identifier.urihttps://physrep.ff.bg.ac.rs/handle/123456789/316-
dc.description.abstractExternal magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy. © 2006 IEEE.en
dc.relation.ispartof2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedingsen
dc.titleMagnetic field influence on silicon surface periodic structures obtained by plasma flow actionen
dc.typeConference Paperen
dc.identifier.doi10.1109/ICMEL.2006.1650916en
dc.identifier.scopus2-s2.0-77956550557en
dc.identifier.urlhttps://api.elsevier.com/content/abstract/scopus_id/77956550557en
dc.relation.firstpage141en
dc.relation.lastpage144en
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextnone-
item.cerifentitytypePublications-
item.openairetypeConference Paper-
item.fulltextNo Fulltext-
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