Silicon surface periodic structures produced by plasma flow induced capillary waves

Abstract

Silicon single crystal surface modification by the action of nitrogen quasistationary compression plasma flow generated by a magnetoplasma compressor is studied. It has been found that highly oriented silicon periodic cylindrical shape structures are produced during a single pulse surface treatment. The periodical structure formation can be related to the driven capillary waves quenched during fast cooling and resolidification phase of the plasma flow interaction with silicon surface. These waves are induced on the liquid silicon surface due to the compression plasma flow intrinsic oscillations. © 2006 American Institute of Physics.