Spectroscopic and real-time imaging investigation of tantalum plasma electrolytic oxidation (PEO)

Abstract

We present the results of plasma electrolytic oxidation (PEO) of tantalum in 12-tungstosilicic acid at 70mA/cm2. For the characterization real-time imaging and optical emission spectroscopy (OES) were used. It has been detected that relatively small microdischarges (cross-sectional area<0.1mm2) are dominant throughout the PEO, while the presence of medium-size microdischarges (cross-sectional area from 0.1mm2 to 0.2mm2) and large microdischarges (cross-sectional area>0.2mm2) become noticeable only at later times of PEO. The elements and their singly charged positive ions present in PEO microdischarges are identified using standard OES technique. The spectral line shape analysis of first two hydrogen Balmer lines shows presence of two microdischarges during PEO. These discharges characterize relatively low electron number densities Ne≈0.9×1015cm-3 and at Ne≈2.2×1016cm-3. A simple OES technique was introduced to test optical thickness of hydrogen Balmer lines emitted during PEO process. © 2011 Elsevier B.V.