Modification of aluminium-titanium and nickel-titanium thin layers by plasma flow action

Abstract

Morphological changes occurring on aluminum-titanium and nickel-titanium thin films, deposited on the silicon substrate, when treated with a compressed plasma flow have been investigated. The results of this type of interaction are compared with the results obtained in experiments where the interaction between the laser beam and the target was investigated. The energy density delivered to the surface is about 10 J/cm2 in both types of interactions. Main similarities of compressed plasma flow treatment used here and laser beam treatment are surface uniform melting, perturbation action on melted surface layer and quenching of the produced surface wave structures.