Characterization of plasma chemistry for an optimized pulse resonance atmospheric-pressure plasma system

Abstract

The paper deals with monitoring the plasma chemistry of an atmospheric plasma low-frequency AC power supply. The study is based on optical spectroscopy and electrical measurements as diagnostic methods. The work includes details of developing and operating an in-house made, non-thermal, dielectric-free atmospheric plasma system, built for biological and agriculture applications. The experimental results clearly show the cross-dependence of the measured outputs (O3, O2, N2) and a wide range of process parameters (duty cycle, discharge frequency, voltage, etc.). A design-of-experiment approach is taken for phase-resolved optical emission spectroscopy of oxygen and nitrogen spectral lines/bands. The new plasma system allows an increase in the plasma-surface interaction selectivity and reduces plasma-induced damages to the surface.