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https://physrep.ff.bg.ac.rs/handle/123456789/1170
Title: | Influence of substrate bias voltage on surface morphology and nanocluster arrangement of gold containing amorphous hydrogenated carbon | Authors: | Videnović, Ivan Thommen, Verena Oelhafen, Peter Mathys, Daniel Düggelin, Marcel Guggenheim, Richard |
Issue Date: | 22-Apr-2002 | Journal: | Applied Physics Letters | Abstract: | Gold containing amorphous hydrogenated carbon (a-C:H/Au) thin films are studied by means of ex situ atomic-force and scanning electron microscopy, and in situ x-ray photoelectron spectroscopy. Introducing a dc substrate bias voltage during magnetron plasma-assisted chemical-vapor deposition of a-C:H/Au results in significant changes of surface morphology and nanocluster arrangement, compared to films deposited on electrically grounded substrates. Grounded samples are rather flat (below 1 nm of roughness), with topmost Au clusters covered with a very thin, nanometer-range layer of a-C:H. On the other hand, the biased sample surface is characterized by large bump structures (up to 13 nm in height) and bald gold clusters. © 2002 American Institute of Physics. |
URI: | https://physrep.ff.bg.ac.rs/handle/123456789/1170 | ISSN: | 0003-6951 | DOI: | 10.1063/1.1471380 |
Appears in Collections: | Journal Article |
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