Diagnostics of silicon submicron cylindrical structures obtained by plasma flow action

Abstract

Periodic submicron cylindrical structures (SCS) produced in a single pulse treatment of silicon single crystal by supersonic compression plasma flow have been studied. The nitrogen quasistationary plasma flow generated by magnetoplasma compressor is used for modification of Si (1 0 0) surface. SCS have been analyzed using optical microscopy, scanning electron microscopy and atomic force microscopy. Typical species of cylindrical structures formed at the silicon surface have been discussed. These structures are induced by the plasma flow action and then quenched from the molten state during fast cooling and resolidification. SCS have been compared to periodical silicon surface structures made by plasma, ion beams and laser interaction with silicon. © 2006 Elsevier Ltd. All rights reserved.