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https://physrep.ff.bg.ac.rs/handle/123456789/316| Title: | Magnetic field influence on silicon surface periodic structures obtained by plasma flow action | Authors: | Dojčinović, I. P. Kuraica, Milorad Mitrovi Ć, M. Randjelovi, Ć D. Matić, M. Puri Ć, J. |
Issue Date: | 1-Jan-2006 | Journal: | 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings | Abstract: | External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy. © 2006 IEEE. |
URI: | https://physrep.ff.bg.ac.rs/handle/123456789/316 | ISBN: | 1424401178 | DOI: | 10.1109/ICMEL.2006.1650916 |
| Appears in Collections: | Conference paper |
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